SS-EN ISO 14644-10 : 2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
Hardcopy
06-01-2022
English
03-11-2013
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
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