SEMI E35 : 2012
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Superseded date
07-23-2013
Published date
01-12-2013
Gives standard metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries.
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