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JIS B 9960-33:2012

JIS B 9960-33:2012

Current

Current

The latest, up-to-date edition.

Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment

Available format(s)

Hardcopy , PDF

Language(s)

English, Japanese

Published date

05-21-2012

Publisher

Japanese Standards Association

This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

DocumentType
Standard
Pages
132
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
IEC 60204-33:2009 Identical

Reaffirmed 2017

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Hardcopy - English
PDF - English
Hardcopy - Japanese
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