Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

07-31-2016

Publisher

British Standards Institution

Committee	CII/9
DocumentType	Standard
Pages	30
PublisherName	British Standards Institution
Status	Current
Supersedes	BS ISO 16700:2004

This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.