SEMI F119:2021
Current
Current
The latest, up-to-date edition.
Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2021
The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing.
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