Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

Available format(s)

Hardcopy , PDF

Superseded date

31-08-2020

Language(s)

English

Published date

01-11-2010

Publisher

American Society for Testing and Materials

This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

Committee	E 42
DocumentType	Guide
Pages	4
PublisherName	American Society for Testing and Materials
Status	Superseded
SupersededBy	ASTM E 983 : 2019 ASTM E 983 : 2010 : R2018
Supersedes	ASTM E 983 : 2005

1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them.

1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.

1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.

1.5 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.