Standard Terminology Relating to Surface Analysis

Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Language(s)

English

Published date

31-12-2010

Publisher

American Society for Testing and Materials

Committee	E 42
DocumentType	Reference Material
Pages	10
PublisherName	American Society for Testing and Materials
Status	Superseded
SupersededBy	ASTM E 673 : 2003
Supersedes	ASTM E 673 : 2002 : REV A

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

ASTM E 1635 : 2006 : R2019	Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
ASTM E 1508 : 2012 : REV A : R2019	Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy
ASTM E 995 : 2016	Standard Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
ASTM E 2734/E2734M : 2010 : R2018	Standard Specification for Dimensions of Knife-Edge Flanges
ASTM E 1881 : 2012 : R2020	Standard Guide for Cell Culture Analysis with SIMS
ASTM E 1523 : 2015	Standard Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
ASTM E 1162 : 2011(R2019)	Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
ASTM E 1016 : 2007 : R2020	Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
ASTM E 984 : 2012 : R2020	Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
ASTM E 2108 : 2016	Standard Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer
ASTM E 2426 : 2010 : R2019	Standard Practice for Pulse Counting System Dead Time Determination by Measuring Isotopic Ratios with SIMS
ASTM E 1438 : 2011(R2019)	Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
ASTM E 1217 : 2011(R2019)	Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
ASTM E 1127 : 2008 : R2015	Standard Guide for Depth Profiling in Auger Electron Spectroscopy
ASTM E 1880 : 2012 : R2020	Standard Practice for Tissue Cryosection Analysis with SIMS
ASTM E 1504 : 2011 : R2019	Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
ASTM E 983 : 2019	Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
ASTM E 1634 : 2011 : R2019	Standard Guide for Performing Sputter Crater Depth Measurements