NF EN ISO 14644-5 : 2004
Current
The latest, up-to-date edition.
CLEAN ROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 5: OPERATIONS
12-01-2013
Avant-propos
Introduction
1 Domaine d'application
2 Références normatives
3 Termes et définitions
4 Spécification des exigences
Annexe A (informative) Systèmes opérationnels
Annexe B (informative) Tenues de salle propre
Annexe C (informative) Personnel
Annexe D (informative) Matériel fixe
Annexe E (informative) Matières et matériel portatif
Annexe F (informative) Nettoyage de la salle propre
Bibliographie
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