IEC 62047-6:2009
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users
English - French
07-04-2009
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
4.1 Design of test piece
4.2 Preparation of test piece
4.3 Test piece thickness
4.4 Storage prior to testing
5 Testing method and test apparatus
5.1 General
5.2 Method of gripping (mounting of test piece)
5.3 Static loading test
5.4 Method of loading
5.5 Speed of testing
5.6 Environment control
6 Endurances (test termination)
7 Test report
Annex A (informative) Technical background of this standard
Annex B (informative) Test piece
Annex C (informative) Displacement measurement
Annex D (informative) Testing environment
Annex E (informative) Number of test pieces
Bibliography
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