Semiconductor devices. Micro-electromechanical devices Performance testing method of vibration-driven MEMS electret energy harvesting devices

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

22-07-2020

Publisher

British Standards Institution

Committee	EPL/47
DocumentType	Standard
ISBN	9780580901980
Pages	20
PublisherName	British Standards Institution
Status	Current

IEC62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1000?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.