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BS EN 62047-26:2016
Current
Current
The latest, up-to-date edition.
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Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
31-05-2016
Publisher
Committee |
EPL/47
|
DevelopmentNote |
Supersedes 14/30294910 DC. (05/2016)
|
DocumentType |
Standard
|
Pages |
34
|
PublisherName |
British Standards Institution
|
Status |
Current
|
Supersedes |
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