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ASTM F 1709 : 1997

ASTM F 1709 : 1997

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Language(s)

English

Published date

01-01-1996

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 10.04, 2016 Defines pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

Committee
F 01
DocumentType
Standard
Pages
3
ProductNote
Reconfirmed 1997
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

ASTM F 3166 : 2016 Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization (Withdrawn 2023)

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PDF - English
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