Name: ASTM E 1505 : 1992 : R1996
Brand: ASTM
Price: 110.51 AUD
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Standard Guide for Determining SIMS Relative Sensitivity Factors from Ion Implanted External Standards

Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Language(s)

English

Published date

15-11-1992

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 03.06, 2009 Describes the secondary ion mass spectrometry (SIMS) analyst with two procedures for determining relative sensitivity factors (RSFs) from ion implanted external standards.

Committee	E 42
DocumentType	Guide
Pages	3
ProductNote	Reconfirmed 1996
PublisherName	American Society for Testing and Materials
Status	Superseded
SupersededBy	ASTM E 1505 : 1992 : R2001

1.1 The purpose of this guide is to provide the secondary ion mass spectrometry (SIMS) analyst with two procedures for determining relative sensitivity factors (RSFs) from ion implanted external standards. This guide may be used for obtaining the RSFs of trace elements (<1 atomic %) in homogeneous (chemically and structurally) specimens. This guide is useful for all SIMS instruments.

1.2 This guide does not describe procedures for obtaining RSFs for major elements (>1 atomic %). In addition, this guide does not describe procedures for obtaining RSFs from implants in heterogeneous (either laterally or in-depth) specimens.

1.3 The values stated in SI units are to be regarded as the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E 673 : 2003

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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ASTM E 1505 : 1992 : R1996

Standard Guide for Determining SIMS Relative Sensitivity Factors from Ion Implanted External Standards

Abstract

General Product Information

Scope

Standards Referencing This Book

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